Low actuation-voltage shift in MEMS switch using ramp dual-pulse
نویسندگان
چکیده
منابع مشابه
Low actuation-voltage shift in MEMS switch using ramp dual-pulse
This paper proposes a ramp dual-pulse actuation-voltage waveform that reduces actuation-voltage shift in capacitive microelectromechanical system (MEMS) switches. The proposed waveform as well as two reported waveforms (dual pulse, and novel dual-pulse) are analyzed using equivalent-circuit and equation models. Based on the analysis outcome, the paper provides a clear understanding of trapped c...
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ژورنال
عنوان ژورنال: IEICE Electronics Express
سال: 2012
ISSN: 1349-2543
DOI: 10.1587/elex.9.1062